Why SUNTO?
Deliver reliable UHP fluid systems for worry-free operation
Founded in 2008, SUNTO specializes in the R&D, manufacturing, and sales of ultra-high-purity (UHP) fluid delivery systems. Our manufacturing campus is located within the Lingang Special Area, Shanghai Pilot Free Trade Zone, China.
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SUNTO Products
Bulk Specialty Gas System (BSGS) is a PLC-based, fully automatic high-flow gas delivery system engineered for ultra-high-purity process gases. Featuring a touchscreen HMI and integrated safety interlock circuitry, it delivers fail-safe, continuous gas supply to ICs, LEDs, TFTs, Solar, and Fiber Optic. Standard configuration includes a dual-cylinder gas cabinet, with optional auxiliary valves and pipeline heaters. Supports SiH₄, NF₃, NH₃, N₂O, HCl, and CO₂.
Bulk Specialty Gas Rack (BSGR) is an open-modular, ultra-high-purity gas delivery system engineered for large-volume bulk gas containers. Constructed with EP-grade 316L stainless steel manifolds and featuring automatic changeover, PLC/HMI control, safety interlocks, and high-flow pipeline expansion, it seamlessly integrates with fab-wide central monitoring systems. Designed for ventilated, independent gas rooms, it serves ICs, LEDs, TFTs, Solar, Fiber Optic, and coating lines with reliable supply of inert and mild corrosive UHP gases at low maintenance cost.
Gas Cabinet (GC) is a PLC-controlled gas delivery system featuring a 5.7" touchscreen HMI and integrated safety interlocks. Built with premium high-purity valves, filters, and pressure sensors, it supports manual purging, automatic cylinder switching, and alarm-triggered emergency shutoff for flammable, corrosive, and toxic specialty gases. Designed for ICs, LEDs, TFTs, Solar, and Fiber Optic, it ensures continuous, high-purity delivery of SiH₄, NH₃, NF₃, and other process-critical gases. Available in a standard dual-cylinder configuration, with optional valve and pipeline heaters.
Gas Rack (GR) is a semi-open gas delivery system engineered for cost-effective, reliable supply of inert, low-risk gases. Featuring pressure regulation, multi-channel nitrogen utility ports, and vent interfaces, it supports manual cylinder switching without automatic purging. Ideal for ICs, LEDs, TFTs, Solar, and Fiber Optic, it delivers auxiliary gases such as N₂, Ar, He, and CDA to low-hazard distribution points.
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Global Business
Our business scope covers the following countries and regions.
Our business scope covers the following countries and regions.
