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BSGS

Bulk Specialty Gas System (BSGS) is a PLC-based, fully automatic high-flow gas delivery system engineered for ultra-high-purity process gases. Featuring a touchscreen HMI and integrated safety interlock circuitry, it delivers fail-safe, continuous gas supply to ICs, LEDs, TFTs, Solar, and Fiber Optic. Standard configuration includes a dual-cylinder gas cabinet, with optional auxiliary valves and pipeline heaters. Supports SiH₄, NF₃, NH₃, N₂O, HCl, and CO₂.

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Integrated Complex Equipment

BSGS(Bulk Specialty Gas System)

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Bulk Specialty Gas System (BSGS) is a PLC-based, fully automatic high-flow gas delivery system engineered for ultra-high-purity process gases. Featuring a touchscreen HMI and integrated safety interlock circuitry, it delivers fail-safe, continuous gas supply to ICs, LEDs, TFTs, Solar, and Fiber Optic. Standard configuration includes a dual-cylinder gas cabinet, with optional auxiliary valves and pipeline heaters. Supports SiH₄, NF₃, NH₃, N₂O, HCl, and CO₂.

System Features

  • ◆ Inlet Pressure Range:Standard 60–100 MPa
  • ◆ Flow Rate Range:Max 1000 SLPM (NF₃, N₂O, NH₃)
  • ◆ Overall Dimensions (L×W×H):Cabinet: 2000 × 2000 × 685 mm
  • ◆ PLC-controlled with touchscreen HMI
  • ◆ Ensures uninterrupted supply and ultra-high purity
  • ◆ Safeguards plant operations and personnel

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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