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Gas Cabinet

Gas Cabinet (GC) is a PLC-controlled gas delivery system featuring a 5.7" touchscreen HMI and integrated safety interlocks. Built with premium high-purity valves, filters, and pressure sensors, it supports manual purging, automatic cylinder switching, and alarm-triggered emergency shutoff for flammable, corrosive, and toxic specialty gases. Designed for ICs, LEDs, TFTs, Solar, and Fiber Optic, it ensures continuous, high-purity delivery of SiH₄, NH₃, NF₃, and other process-critical gases. Available in a standard dual-cylinder configuration, with optional valve and pipeline heaters.

Home Facilities GC&VMB Gas Cabinet
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Integrated Complex Equipment

GC（Gas Cabinet）

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Gas Cabinet (GC) is a PLC-controlled gas delivery system featuring a 5.7" touchscreen HMI and integrated safety interlocks. Built with premium high-purity valves, filters, and pressure sensors, it supports manual purging, automatic cylinder switching, and alarm-triggered emergency shutoff for flammable, corrosive, and toxic specialty gases. Designed for ICs, LEDs, TFTs, Solar, and Fiber Optic, it ensures continuous, high-purity delivery of SiH₄, NH₃, NF₃, and other process-critical gases. Available in a standard dual-cylinder configuration, with optional valve and pipeline heaters.

System Features

  • ◆ Inlet Pressure Range:Min 10, MAX 500
  • ◆ Overall Dimensions (L×W×H):800 × 2110 × 748.9 mm
  • ◆ Outlet Supply Pressure:Standard 50L–60; Min0.1–Max450
  • ◆ PLC-controlled with intuitive HMI and illuminated push-button operation
  • ◆ Built-in safety interlock logic embedded in PLC programming
  • ◆ Ensures uninterrupted supply and ultra-high purity for production processes

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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