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Background
Integrated Complex Equipment

GR(Gas Rack)

Background Equipment
Gas Rack (GR) is a semi-open gas delivery system engineered for cost-effective, reliable supply of inert, low-risk gases. Featuring pressure regulation, multi-channel nitrogen utility ports, and vent interfaces, it supports manual cylinder switching without automatic purging. Ideal for ICs, LEDs, TFTs, Solar, and Fiber Optic, it delivers auxiliary gases such as N₂, Ar, He, and CDA to low-hazard distribution points.

System Features

  • ◆ Inlet Pressure Range:Min 10, MAX 500
  • ◆ Outlet Supply Pressure:50L
  • ◆ Overall Dimensions (L×W×H):800 × 2110 × 748.9 mm
  • ◆ Semi-open frame design dedicated to inert and low-risk process gases
  • ◆ Simplified structure with fewer safety sensors compared to fully enclosed cabinets
  • ◆ Manual cylinder changeover workflow — no automatic purge cycle

Main Features

Feature 1

Cost-effective, lightweight design with exposed piping for easy O&M

Feature 1

Built-in pressure regulation, sealing, and retention assemblies for steady supply

Feature 1

Independent nitrogen branches for valve actuation, cabinet purge, and cylinder replacement

Feature 1

Optional heating modules for cylinders and piping, with separate UPS and mains power

Feature 1

Integrated vent pipeline for safe exhaust during maintenance

Applications

Application Background
◆ Semiconductor wafer fabs
◆ PV and LED component manufacturing
◆ Optical fiber and flat-panel display production
◆ Biopharmaceutical R&D and precision labs

Suitable Occasions

Nitrogen

Cleanroom intermediate gas distribution stations

Nitrogen

Production lines requiring continuous non-toxic, non-flammable inert gas

Nitrogen

Low-hazard process zones with regular manual cylinder exchange

Nitrogen

Factory utility corridors connecting central gas source to VMP/VMB panels

Suitable for Fluids

Application Background
◆ Inert bulk gases: N₂, Ar, He
◆ Clean Dry Air (CDA), oxygen, and other non-corrosive, non-pyrophoric industrial gases

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