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BSGR

Bulk Specialty Gas Rack (BSGR) is an open-modular, ultra-high-purity gas delivery system engineered for large-volume bulk gas containers. Constructed with EP-grade 316L stainless steel manifolds and featuring automatic changeover, PLC/HMI control, safety interlocks, and high-flow pipeline expansion, it seamlessly integrates with fab-wide central monitoring systems. Designed for ventilated, independent gas rooms, it serves ICs, LEDs, TFTs, Solar, Fiber Optic, and coating lines with reliable supply of inert and mild corrosive UHP gases at low maintenance cost.

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Integrated Complex Equipment

BSGR(Bulk Specialty Gas Rack)

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Bulk Specialty Gas Rack (BSGR) is an open-modular, ultra-high-purity gas delivery system engineered for large-volume bulk gas containers. Constructed with EP-grade 316L stainless steel manifolds and featuring automatic changeover, PLC/HMI control, safety interlocks, and high-flow pipeline expansion, it seamlessly integrates with fab-wide central monitoring systems. Designed for ventilated, independent gas rooms, it serves ICs, LEDs, TFTs, Solar, Fiber Optic, and coating lines with reliable supply of inert and mild corrosive UHP gases at low maintenance cost.

System Features

  • ◆ Inlet Pressure Range:Standard 60–100 MPa
  • ◆ Flow Rate Range:Max 1000 SLPM(N₂O)
  • ◆ Overall Dimensions (L×W×H):Cabinet: 2000 × 2000 × 685 mm
  • ◆ Complete safety interlock package: overpressure relief, excess flow cutoff, ESD, and gas leak detection; all electrical components comply with SEMI safety standards
  • ◆ Fully automatic PLC/HMI touchscreen control with automatic cylinder changeover, timed N₂ purge, vacuum evacuation, and vent cycling; weight monitoring and multi-level pressure interlocks with audible/visual alarms
  • ◆ Open modular frame — lightweight, compact, compatible with Y-cylinders, T-drums, cylinder bundles, and ISO bulk containers

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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