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Integrated Complex Equipment

Valve Manifold

Background Equipment
Valve Manifold is an integrated multi-valve assembly combining shut-off, balance, and purge valves to minimize leakage points. Featuring compact high-purity flow paths and all-metal seals, it is ideal for ICs, TFTs, Solar and Fiber Optic. Suitable for transmitter measurement, gas cabinet purging, and equipment gas control — handles inert, corrosive, and toxic specialty gases.

System Features

  • ◆ Modular integrated multi-valve structure: shut-off, balance, purge, and exhaust valves — reduces connection points and leakage risks
  • ◆ Compact monoblock design with high-purity seamless internal flow channels
  • ◆ Available in 2-, 3-, and 5-valve configurations
  • ◆ All-metal sealing joints with ultra-low helium leak rate; supports threaded, face-seal, and compression connections
  • ◆ Optional built-in sensor ports and ESD emergency cut-off ports for independent equipment control
  • ◆ Available in low/high pressure grades; corrosion-resistant stainless steel or alloy body materials

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