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GAS LINE

This high-purity gas line adopts smooth treated seamless metal tubes, orbital welded in cleanrooms with all-metal leak-proof joints. Optional double jacket & heat tracing fit hazardous gas. For semiconductor, optoelectronic fabs, it serves etching, deposition processes, conveying bulk inert, pyrophoric, corrosive and MO carrier gases.

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Integrated Complex Equipment

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System Features

  • ◆ Manufactured from high-purity seamless metal tubing with ultra-smooth inner surface treatment to minimize particle retention and gas adsorption
  • ◆ Full orbital welding construction completed inside high-grade cleanrooms with dedicated deoxidation and precision cleaning processes
  • ◆ Integrated all-metal sealing connection structure with ultra-low leakage rate to avoid secondary contamination from polymer gaskets
  • ◆ Modular prefabrication scheme with customized anti-collision fixtures and standardized welding tooling for stable consistent quality
  • ◆ Optional double containment jacket structure and heat tracing assembly for high-risk or constant-temperature gas delivery

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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