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CQC

Continuous Quality Control (CQC) Cabinet is an integrated monitoring system designed for ppb-level purity verification downstream of gas purifiers. Featuring multiple analytical technologies, real-time impurity tracking, and comprehensive safety protection, it supports data interlock and full traceability. Serves semiconductor, PV, and display fabs for high-purity bulk gases including N₂, O₂, H₂, and CDA.

Home Facilities Auxiliary CQC
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Integrated Complex Equipment

Background Equipment

System Features

  • ◆ End-point continuous monitoring unit installed downstream of gas purifiers
  • ◆ Ultra-high precision trace impurity detection at ppb-level resolution
  • ◆ Fully integrated cabinet with ultra-clean high-purity gas pipeline modules
  • ◆ Multi-layer intrinsic safety design for H₂ and flammable gas handling
  • ◆ Flexible configuration: standalone gas analyzers or mass spectrometer integration

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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