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GAS BOX

This modular enclosed GAS BOX delivers precise mixing & delivery of hazardous specialty gases with auto-purge safety interlocks, corrosion-resistant high-purity flow paths and MFC integrated control. It serves etching, deposition & ion implantation in semiconductor, PV and display fabs for flammable, toxic and corrosive process precursors.

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Integrated Complex Equipment

Gas Box

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This modular enclosed GAS BOX delivers precise mixing & delivery of hazardous specialty gases with auto-purge safety interlocks, corrosion-resistant high-purity flow paths and MFC integrated control. It serves etching, deposition & ion implantation in semiconductor, PV and display fabs for flammable, toxic and corrosive process precursors.

System Features

  • ◆ Modular integrated gas delivery unit installed between gas source and semiconductor process chamber
  • ◆ Fully enclosed airtight cabinet with dedicated exhaust ports for hazardous gas safety control
  • ◆ Compact miniaturized structure with high corrosion resistance and ultra-precise flow & pressure control
  • ◆ Customizable internal pipeline layout built with high-purity, leak-tight process components
  • ◆ Equipped with automatic gas switching and full purge cycle functions for risk isolation

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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