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VAPORIZER

This compact evaporator produces stable ultra-high-purity vapor via closed-loop temp & liquid level control. Built with uniform vaporization modules and safety interlocks, it allows long unmanned operation for semiconductor, PV, fiber ALD, CVD & epitaxy thin-film processes with SiCl₄, TCS.

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Integrated Complex Equipment

VAPORIZER(EVAPORATION SYSTEM)

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This compact evaporator produces stable ultra-high-purity vapor via closed-loop temp & liquid level control. Built with uniform vaporization modules and safety interlocks, it allows long unmanned operation for semiconductor, PV, fiber ALD, CVD & epitaxy thin-film processes with SiCl₄, TCS.

System Features

  • ◆ Self-contained liquid evaporation unit built for high-precision, steady delivery of ultra-high-purity chemical vapor
  • ◆ Compact footprint with multi-sided configurable process ports for flexible factory layout integration
  • ◆ Fully sealed corrosion-resistant inner containment structure
  • ◆ Separated modular zones for electrical control, cooling and gas circuits for easy maintenance and safe operation
  • ◆ Closed-loop temperature and liquid level control to sustain stable vapor saturation during long continuous production runs
  • ◆ Overall Dimensions (L×W×H):Cabinet: 2000 × 800 × 2000 mm
  • ◆ Port & Piping Design Dimensions:1/4″, 1/2″

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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