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TCS BUBBLER

TCS Bubbler delivers controlled TCS vapor for epitaxy via hydrogen bubbling, with PLC control, real-time monitoring, and tool interlock safety.

Home Process Tools LIQUID TOOLS TCS BUBBLER
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Integrated Complex Equipment

BUBBLER(Liquid Bubbling System)

Background Equipment
TCS Bubbler delivers controlled TCS vapor for epitaxy via hydrogen bubbling, with PLC control, real-time monitoring, and tool interlock safety.

System Features

  • ◆ Precise process control: Uses hydrogen carrier gas to bubble TCS liquid at constant temperature, generating process gas with controllable flow rates.
  • ◆ PLC-based system: Controlled by Omron/Siemens PLC with a 10-inch color touchscreen HMI for intuitive operation.
  • ◆ Safety & monitoring: Supports interlock connection with production tools, real-time equipment status display, and user permission management.
  • ◆ Flexible bubbler options: Available in 4L and 14L volumes, with operating pressure up to 4 bar (design pressure 10 bar).
  • ◆ Utilities compatibility: Requires 7 barg pneumatic supply, exhaust (150 m³/hr), and UPS power (110/240VAC, 1kVA); optional cooling water support.
  • ◆ Overall Dimensions (L×W×H):550 × 600 × 2130 mm
  • ◆ Sampling port; compatible with multiple analyzers

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It can achieve continuous and uninterruptedsafe supply of electronic-grade specialtygases at high flow rates and is mainlycontrolled by PLC. The touch screen is thehuman-machine interface.

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