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Background
Integrated Complex Equipment

LDS(LIQUID DELIVERY SYSTEM)

Background Equipment
UHP Liquid Delivery System delivers advanced precursors for CVD/ALD processes. With tight pressure control (±50 mbar), patented backup mode, smart empty control, and PLC-based operation, it ensures contamination-free, reliable precursor distribution.

System Features

  • ◆ Precise pressure control: Tight delivery pressure control (±50 mbar) for stable liquid flow and vaporization
  • ◆ Reliability features: Patented back-up mode, smart empty control for 100% chemical usage, and validated chemical purge sequences
  • ◆ Control system: PLC-based technology with a 10" color touch screen for operation
  • ◆ Compatibility: Accepts any SEMI-compliant canister, with customized signal interfaces for OEM tools
  • ◆ Utilities requirements: Supports UHP He/N₂ (7barg, 10m³/hr), pneumatic air, exhaust (300m³/hr), vacuum (<1Torr), and UPS power (110/240VAC, 1kVA)

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