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Background
Integrated Complex Equipment

VMB(Valve Manifold Box)

Background Equipment
Valve Manifold Box (VMB) is a PLC-controlled gas distribution system equipped with a touchscreen HMI, safety interlocks, and automatic shutoff capability. It delivers safe, uninterrupted supply of hazardous specialty gases to downstream process tools.

System Features

  • ◆ Overall Dimensions (L×W×H):925 × 1801 × 380 mm
  • ◆ Control Mode:Full-function (purge + vent), Semi-function (purge only)
  • ◆ Supply / Outlet Branch Ports Up to 20 outlets; 1-in 12-out, 1-in 4/6-out, 1-in 8-out
  • ◆ PLC-controlled with intuitive touchscreen interface
  • ◆ Safety interlock logic fully integrated into PLC programming
  • ◆ Ensures continuous gas supply and uncompromised purity

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